On this work, the affect of the fabric of the contact sublayer and the expansion temperature on the geometric dimensions and the worth of the piezoelectric response of carbon nanotubes for his or her use in nanopiezotronic gadgets is investigated. The thermodynamic legal guidelines that characterize the processes occurring within the “catalyst/sublayer/substrate” system have been established. It was discovered that with a rise in temperature, the carbon nanotubes density decreases from 1.1 to 0.001 µm−2 for Mo, and from 26 to 0.1 µm−2 for Cr. The worth of the piezoelectric response was estimated, which ranged from 8 to 14 nA for the Cr sublayer and from 3 to 23 nA for the Mo sublayer. It’s proven that the obtained buildings are promising for the creation of nanopiezotronic components (nanogenerators, power nanoharvesters).